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PERSPEKTIVNYE MATERIALY

2022, No.10

Properties of a light structural magnesium
IMV7-1 type alloy of the Mg – Y – Gd – Zr system
with the additions of cerium-group rare-earth metals
such as samarium, neodymium, and lanthanum


L. L. Rokhlin, T. V. Dobatkina, I. E. Tarytina,
E. A. Lukyanova, O. A. Ovchinnikova


The effect of small additions of cerium-group rare-earth metals such as samarium (Sm), neodymium (Nd) and lanthanum (La) on the properties of a light high-strength structural magnesium IMV7-1 type alloy of the Mg – Y – Gd – Zr system, where yttrium (Y) and gadolinium (Gd) are yttrium-group rare earth metals, has been studied. It is established that the presence of small quantities of samarium in the IMV7-1 alloy contributes to an increase in its strength properties upon heat treatment (aging) and makes it possible to reduce the time to reach the maximum strengthening. In the case where two other cerium-group rare earth metals, neodymium and lanthanum, are present in the IMV7-1 type alloy, the strengthening upon heat treatment (aging) is also observed, but to a much lesser extent. It has also been established that, as the contents of the main alloying elements (yttrium and gadolinium) are simultaneously increased and samarium is added, the maximum strengthening of the alloys under study gradually increases, and the time to its achievement decreases. The fact that the alloying with samarium results in substantially higher strengthening of the IMV7-1 type alloy than that provided by neodymium and lanthanum is explained by a much higher solubility of samarium compared to these of neodymium and lanthanum in solid magnesium.


Keywords: magnesium alloys, rare earth metals, solid solution decomposition.


DOI: 10.30791/1028-978X-2022-10-5-13

Rokhlin Lazar — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow 119334, Leninsky Prospect, 49) Dr Sci (Eng), chief researcher, specialist of materials science, E-mail: rokhlin@imet.ac.ru.

Dobatkina Tatyana — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow 119334, Leninsky Prospect, 49), PhD (Eng), leading researcher, specialist of materials science. E-mail: dobat@imet.ac.ru.

Tarytina Irina — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow 119334, Leninsky Prospect, 49), research fellow, specialist of materials science. E-mail: tarytina@yandex.ru.

Lukyanova Elena — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow 119334, Leninsky Prospect, 49) PhD (Eng), senior researcher, specialist of materials science. E-mail: helenelukyanova@gmail.com.

Ovchinnikova Olga — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow 119334, Leninsky Prospect, 49), senior researcher, specialist of analytical chemistry. E-mail: o-china@yandex.ru.

Rokhlin L.L., Dobatkina T.V., Tarytina I.E., Lukyanova E.A., Ovchinnikova O.A. Svojstva legkogo konstrukcionnogo magnievogo splava tipa IMV7-1 sistemy Mg – Y – Gd – Zr pri vvedenii v nego dobavok redkozemel'nyh metallov cerievoj gruppy: samariya, neodima i lantana [Properties of a light structural magnesium IMV7-1 type alloy of the Mg – Y – Gd – Zr system with the additions of cerium-group rare-earth metals such as samarium, neodymium, and lanthanum]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 5 – 13. DOI: 10.30791/1028-978X-2022-10-5-13

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Composite proton electrolytes based on acid salts


I. S. Timakov, V. V. Grebenev, V. A. Komornikov,
S. V. Prokudin


The problem of high plasticity and fluidity of phases of acidic salts with high proton conductivity of such superproton crystals of the MmHn(AO4)(m+ n)/2 · yH2O (где M = NH4, K, Rb, Cs; А = P, As, S, Se). Various methods are chosen for obtaining composite materials based on the proton conductor Cs6(SO4)3(H3PO4)4with the formation of a three-dimensional reinforcing fabric by the volume of the material present. For the first time, the temperature dependences of the hardness and elasticity of polycrystalline Cs6(SO4)3(H3PO4)4pressed into a pellet were measured before and after the transition to the superproton state. Composite materials with the compositions xCs6(SO4)3(H3PO4)4(1 – x)teflon and xCs6(SO4)3(H3PO4)4(1 – x)[SiOR]n (where 0.95 ≥ x ≥ 0.5 wt. %). The method of X-ray phase analysis on consumption dependency Taking into account the raster electronic assessment of the calculation of income phases in the income of composite materials. It is shown that with the proportion of the reinforcing component, the conductive phase is enveloped. Conductivity of composite materials research by impedance spectroscopy.


Keywords:Superprotonic crystals, phase transitions, composite materials, nanoindentation, hardness, elastic modulus.


DOI: 10.30791/1028-978X-2022-10-14-22

Timakov Ivan — Federal Scientific Research Centre “Crystallography and Photonics” of RAS (119333, Moscow, Leninsky Prospekt, 59), junior researcher, specialist in the field of crystal growth. E-mail: istimakov@gmail.com.

Grebenev Vadim — Federal Scientific Research Centre “Crystallography and Photonics” of Russian Academy of Sciences (119333, Moscow, Leninsky Prospekt, 59), PhD (Phys-Math), senior researcher, specialist in the field crystal growth. E-mail: vadim_grebenev@mail.ru.

Komornikov Vladimir — Federal Scientific Research Centre “Crystallography and Photonics” of Russian Academy of Sciences (119333, Moscow, Leninsky Prospekt, 59), PhD (Chem), senior researcher, specialist in the field of crystal growth. E-mail: vakom@mail.ru.

Prokudin Sergey — Federal State Budgetary Scientific Institution “Technological Institute of Superhard and New Carbon Materials” (108840, Moscow, Troitsk, Tsentralnaya street, 7a), junior researcher. E-mail: sergei.tisnum@gmail.com.

Timakov I.S., Grebenev V.V., Komornikov V.A., Prokudin S.V. Kompozitnye protonnye elektrolity na osnove kislyh solej [Composite proton electrolytes based on acid salts]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 14 – 22. DOI: 10.30791/1028-978X-2022-10-14-22

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Formation of biomimetic apatite on calcium phosphate
foam ceramics in the concentrated model solution


L. Yu. Maslova, V. K. Krut’ko, O. N. Musskaya,
 T. V. Safronova, A. I. Kulak


By firing polyurethane foam templates (“STR” brand, 12 pores per cm, China) with a porosity of ~ 65 % at 1200 °С, an open-pore calcium phosphate foam ceramics was obtained using a highly concentrated suspension based on synthetic hydroxyapatite, heat-treated at 800 °С, monocalcium phosphate monohydrate and 0.8 % polyvinyl alcohol. The resulting calcium phosphate foam ceramics after modification in the SBF (Simulated Body Fluid) solution concentrated 5 times (SBF´5) consisted of β-tricalcium phosphate, β-calcium pyrophosphate and biomimetic apatite, had a porosity of 53 – 59 % and a static strength of ~ 0.05 MPa. The formed biomimetic apatite, consisting of amorphous calcium phosphate Ca9(PO4)6 and apatite tricalcium phosphate Ca9HPO4(PO4)5OH, crystallizes into β-tricalcium phosphate at 1200 °С. Calcium phosphate foam ceramics modified with biomimetic apatite, after soaking in 5 % hydroxyapatite gel and SBF´5, which simulating a bone defect in vitro, in parallel with the formation of biomimetic apatite, is partially destroyed, which confirmed its high bioactivity and degradation.


Keywords:calcium phosphate foam ceramics, tricalcium phosphate, hydroxyapatite, concentrated Simulated Body Fluid (SBF´5), biomimetic apatite, degradation.


DOI: 10.30791/1028-978X-2022-10-23-30

Maslova Lyubov — Institute of General and Inorganic Chemistry, National Academy of Sciences of Belarus (Republic of Belarus, Minsk, 220072, 9/1 Surganova Str.), Ph D student, junior researcher of the laboratory of Photochemistry and Electrochemistry, field of interest — calcium phosphate foam ceramics and composites. E-mail: maslova@igic.bas-net.by.

Krut’ko Valentina —Institute of General and Inorganic Chemistry, National Academy of Sciences of Belarus (Republic of Belarus, Minsk, 220072, 9/1 Surganova Str.), Ph D (Chem), assistant professor, head of the laboratory of Photochemistry and Electrochemistry, field of interest — apatite structures and hybrid materials. E-mail: tsuber@igic.bas-net.by.

Musskaya Olga — Institute of General and Inorganic Chemistry, National Academy of Sciences of Belarus (Republic of Belarus, Minsk, 220072, 9/1 Surganova Str.), Ph D (Chem), assistant professor, leading researcher of the laboratory of Photochemistry and Electrochemistry, field of interest — calcium phosphate cements and composites. E-mail: musskaja@igic.bas-net.by.

Safronova Tatiana — Lomonosov Moscow State University (Russian Federation, Moscow, 119991, 1 Leninskie Gory), Ph D (Eng), assistant professor, senior researcher of the materials science faculty, field of interest – calcium phosphate ceramics. E-mail: t3470641@yandex.ru.

Kulak Anatoly — Institute of General and Inorganic Chemistry, National Academy of Sciences of Belarus (Republic of Belarus, Minsk, 220072, 9/1 Surganova Str.), academician of the National Academy of Sciences of Belarus, Dr Sci (Chem), professor, Director of the Institute, field of interest — photoelectrochemistry and nanomaterials.

Maslova L.Yu., Krut’ko V.K., Musskaya O.N., Safronova T.V., Kulak A.I. Formirovanie biomimeticheskogo apatita na kal'cijfosfatnoj penokeramike v koncentrirovannoj model'noj srede [Formation of biomimetic apatite on calcium phosphate foam ceramics in the concentrated model solution]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 23 – 30. DOI: 10.30791/1028-978X-2022-10-23-30

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Corrosion resistance test of powders
of corundum, titanium nitride, and TiB2/TiN eutectic
composition alloy in the supercritical aqueous fluid


A. G. Tarasov, V. A. Veretennikov


The article presents the results of experimental studying of corrosion resistance of corundum, titanium nitride and TiB2/TiNi powder samples in supercritical aqueous fluid (SAF). The tests were proceeded in autoclave (temperature of 400 °C, steam pressure of 100 MPa) during 100 hours. As a result, it was found that Al2O3 (corundum) and TiN are resistant materials, whereas the TiB2 phase of eutectic alloy dissolves in an aqueous SAF medium. Deep corrosion index value is considered.


Keywords: supercritical state, supercritical (hydrothermal) aqueous fluid, SAF, highly superheated steam, HSS, corrosion resistance, corundum, titanium nitride, eutectic alloy TiB2/TiN, waste recycling.


DOI: 10.30791/1028-978X-2022-10-31-34

Tarasov Alexey — The Institute of Structural Macrokinetics, Russian Academy of Sciences (ISMAN, 142432 Moscow Region, Chernogolovka, Academician Osipyan str., 8), PhD, senior researcher, specialist in the field of fast physical and chemical processes. E-mail: aleksei_tarasov@mail.ru.

Veretennikov Vladimir —Institute of Structural Macrokinetics RAS (ISMAN, 142432 Moscow Region, Chernogolovka, Academician Osipyan str., 8), PhD, leading researcher, specialist in the field of fast physical and chemical processes. E-mail: veretm@mail.ru.

Tarasov A.G., Veretennikov V.A. Ispytanie korrozionnoj stojkosti poroshkov korunda, nitrida titana i splava evtekticheskogo sostava TiB2/TiN v srede sverhkriticheskogo vodnogo flyuida. [Corrosion resistance test of powders of corundum, titanium nitride, and TiB2/TiN eutectic composition alloy in the supercritical aqueous fluid]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 31 – 34. DOI: 10.30791/1028-978X-2022-10-31-34

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Synthesis and research of optically
transparent polymer on the basis
of 2-metoxycarbonylparacyclopropylestyrene
with glicidilmethacrylate


K. G. Guliyev, S. B. Mamedli


The new polyfunctional optically transparent polymer on the basis of 2-methoxycarbonyl paracyclopropyl styrene and glycidyl methacrylate has been synthesized. The compositions and structures have been established and the parameters of copolymerization of the synthesized copolymer have been found. The copolymerization constant values on Feineman – Ross equation (r1= 1.36, r2 = 0.30) and Q – e parameters on Alfrey – Price (Q1 = 2.573, е1 = –0.846) have been calculated. It has been detected that 2-methoxycarbonyl paracyclopropyl styrene is more active monomer than glycidyl methacrylate. The parameters of the copolymer microstructure have been determined. In comparison with polystyrene, the obtained copolymer has a higher refractive index. It has been established that the degree of light transmission (= 1.5820) is 88 – 90 %. Depending on the composition of the optically transparent copolymer, the change rate of the light transmission index has been studied. It has been shown that the synthesized copolymer exceeds polystyrene and glycidyl methacrylate on the main exploitation indices and shows the high optical transparency, which allows its use in the manufacture of details of optical devices.


Keywords:copolymer, optically transparent materials, glicidilmethacrylate, 

2-metoxycarbonylparacyclopropylestyrene, light transmission.


DOI: 10.30791/1028-978X-2022-10-35-42

Guliyev Kazim Gafar oglu —Institute of Polymer Materials of ANAS (AZ5004, Azerbaijan Republic, Sumgait, S.Vurgun str., 124), Dr Sci (Chem), head of the laboratory, specialist in the field of synthesis of photosensitive and optically transparent polymer materials. E-mail:
guliyev.kazim_pm@mail.ru.

Mamedli Saida Bakhtiyar gizi — Institute of Polymer Materials of ANAS (AZ5004, Azerbaijan Republic, Sumgait, S.Vurgun str., 124), PhD (Chem), head of the laboratory, specialist in the field of synthesis of optically transparent polymer materials. E-mail: seide.mamedli@yandex.ru.

Guliyev K.G., Mamedli S.B. Sintez i izuchenie svojstv opticheski prozrachnogo polimera na osnove 2-metoksikarbonilparaciklopropilstirola i glicidilmetakrilata [Synthesis and research of optically transparent polymer on the basis of 2-metoxycarbonylparacyclopropylestyrene with glicidilmethacrylate]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 35 – 42. DOI: 10.30791/1028-978X-2022-10-35-42

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Mechanical properties and structure
of the ZrN – Zr composite material produced
 by the oxidation constructing approach


A. V. Shokodko, A. I. Ogarkov, A. A. Ashmarin,
D. V. Prosvirnin, I. A. Kovalev,
A. G. Kolmakov, A. S. Chernyavskii, K. A. Solntsev


Using the approach of oxidative constructing due to diffusion saturation, massive samples of compact metal-ceramic composite materials with a gradient structure were obtained: a nitride ceramic shell is a near-surface layer of ZrN, a solid solution of nitrogen in zirconium is a core, which is a solid solution of nitrogen in zirconium. The synthesized composites have better strength indicators compared to the original metal blanks. Under compression conditions, composite samples ZrN – Zr are characterized by plasticity, under bending conditions, they are brittle. The applied approach of oxidative design makes it possible, in comparison with traditional methods, to obtain rather efficiently and economically gradient ceramic-metal samples of products with dimensions and shapes that maximally repeat those of the original metal workpiece.


Keywords: composite materials, nitride ceramics, zirconium nitride, oxidative constructing, mechanical properties.


DOI: 10.30791/1028-978X-2022-10-43-51

Shokodko Aleksandr — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), PhD, senior researcher, specialist in the field of technology of ceramic materials. E-mail: shokodjko@rambler.ru.

Ogarkov Aleksandr — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), junior researcher, specialist in the field of technology of ceramic materials. E-mail: aogarkov@imet.ac.ru.

Ashmarin Artem — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), PhD (Eng), leading researcher, specialist in the field of diffraction research methods. E-mail: ashmarin_artem@list.ru.

Prosvirnin Dmitrii — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), PhD (Eng), senior researcher, specialist in the field of deformation and destruction of materials. E-mail: mail.imetran@gmail.com.

Kovalev Ivan — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), PhD (Chem), senior researcher, specialist in the field of technology of ceramic materials. E-mail: vankovalskij@mail.ru.

Kolmakov Aleksei — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), corresponding Member of the Russian Academy of Sciences, chief researcher, specialist in the field of deformation and destruction of materials. E-mail: akolmakov@imet.ac.ru.

Chernyavskii Andrei — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), PhD (Eng), leading researcher, specialist in the field of technology of ceramic materials. E-mail: andreych_01@mail.ru.

Solntsev Konstantin — Baikov Institute of Metallurgy and Materials Science of RAS (Moscow, 119334, Leninsky prospect, 49), academician of the Russian Academy of Sciences, scientific Supervisor of the Institute, specialist in the field of technology of ceramic materials. E-mail: solntsev@pran.ru.

Shokodko A.V., Ogarkov A.I., Ashmarin A.A., Prosvirnin D.V., Kovalev I.A., Kolmakov A.G., Chernyavskii A.S., Solntsev K.A. Mekhanicheskie svojstva i struktura kompozicionnogo materiala ZrN – Zr, poluchennogo metodom okislitel'nogo konstruirovaniya [Mechanical properties and structure of the ZrN – Zr composite material produced by the oxidation constructing approach]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 43 – 51. DOI: 10.30791/1028-978X-2022-10-43-51

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Obtaining hybrid nanostructures based
on graphene and nano-ZrO2


A. M. Afzal, E. A. Trusova, A. A. Konovalov


A technologically promising method for obtaining nanostructured graphene/ZrO2has been proposed. Its main idea is to use suspensions of graphene and nano-ZrO2and create conditions for the interaction of graphene sheets and ZrO2crystallites to form a hybrid nanostructured powder without the formation of new chemical bonds. The oxygen-free graphene sheets with thickness of several nanometers were obtained by sonochemical method in N,N-dimethyloctylamine-aqua emulsion. Nano-ZrO2 powder with average crystallite size of 8.1 nm was synthesized by sol-gel method. The morphology and phase composition of all synthesized objects (nano-ZrO2, graphene, composite) were studied by using a set of instrumental methods (transmission electron microscopy (TEM) and electron diffraction, x-ray diffraction (XRD), electron energy loss spectroscopy (EELS), nitrogen adsorption-desorption, diffusion aerosol spectrometry (DAS) and elemental analysis). It was shown that the proposed method allows obtain chemically homogeneous mesoporous hybrid powders consisting of graphene sheets and ZrO2 crystallites with a size of 8 – 13 nm fixed on them. We investigated an effect of duration of ultrasonic impact to graphite on the morphology of the hybrid and the mechanism of its formation. According to the results of a comprehensive analysis of the obtained data, the mechanisms for the formation of graphene suspension in emulsion and a nanostructured hybrid during the interaction of crystalline ZrO2 and oxygen-free graphene sheets in an aqueous-organic medium was proposed. The developed hybrid nanostructures are highly demanded innovative raw-products in the production of (photo)catalysts for a wide range of processes, sensor, ceramic and electrical materials, and materials for medical and biological purposes.


Keywords:nano-ZrO2, oxygen-free graphene, nanopowdery composites, graphene based hybrid nanostructures, sonochemistry.


DOI: 10.30791/1028-978X-2022-10-52-63

Afzal Asya — Baikov Institute of Metallurgy and Materials Science of the Russian Academy of Sciences (Moscow, 119334, Leninsky Prospekt, 49), postgraduate student, research engineer, specialist in the synthesis of nanostructures. E-mail: asya.afzal@mail.ru.

Trusova Elena — Baikov Institute of Metallurgy and Materials Science of the Russian Academy of Sciences (Moscow, 119334, Leninsky Prospekt, 49), PhD in Chemistry, senior scientist, specialist in the synthesis of nanostructures. E-mail: trusova03@gmail.com.

Konovalov Anatoly — Baikov Institute of Metallurgy and Materials Science of the Russian Academy of Sciences (Moscow, 119334, Leninsky Prospekt, 49), PhD in Chemistry, leading researcher, specialist in inorganic chemistry. E-mail: ak357@rambler.ru.

Afzal A.M., Trusova E.A., Konovalov A.A. Poluchenie gibridnyh nanostruktur na osnove grafena i nano-ZrO2 [Obtaining hybrid nanostructures based on graphene and nano-ZrO2]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 52 – 63. DOI: 10.30791/1028-978X-2022-10-52-63

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Influence of rigid and flexible matrices
on ultimate strength and fracture mechanisms
of polymer composite materials upon impact
and static loading conditions


I. K. Krylov, N. V. Korneeva, V. V. Kudinov


An universal method “Break upon Impact and Static” (RUS) has been developed for the experimental determination of the ultimate strength properties of polymer composite materials based on multifilament nanocrystalline ultra-high molecular weight polyethylene (UHMWPE) fibers, which differs in the method of fixing the sample in a testing machine.The method is carried out using a uniform BIS-sample with an intermediate matrix at the ends and equipment for its attachment to the platforms of testing machines. The sample is a round composite rod composed of the fibers and matrices under investigation, which is held in the tooling by an additional matrix that fixtures it under various loading rates. The RUS method was used to study the properties and mechanisms of destruction upon impact and in a static situation of anisotropic polymer and hybrid composite materials (PCM and HCM) based on flexible and rigid matrices reinforced with hybrid fibers of carbon, aramid, and UHMWPE-fibers activated by non-equilibrium low-temperature plasma. The breaking loads under low-velocity impact and static bending conditions, relative deformation, specific absorbed-in-fracture energy, work of adhesion, shear strength, and other properties are determined. It was found out that the plasticity of the matrix and the hybrid fiber composition affect the properties and fracture mode of PCM and HCM. For the destruction of HCM with a flexible matrix upon impact, a load twice as large as for composites with a rigid matrix is required. HCMs have the highest strength, in which at all stages of loading up to failure, joint deformation of the matrix and the reinforcing fiber occurs. The mechanism of deformation and destruction of anisotropic HCM upon impact is stepwise, while the nature of the deformation curve is zigzag. In statics, the deformation proceeds smoothly. By changing the ratio of carbon and UHMWPE-fibers during hybridization, it is possible to control the properties of HCM and improve its specific properties. The combination of carbon and UHMWPE-fibers in a hybrid fiber for reinforcing a flexible matrix makes it possible to create a material with a delayed fracture. It has been established that for HCM based on a flexible matrix reinforced with a hybrid fiber combining 20 % carbon and 80 % UHMWPE fiber, the fracture load increases by factor 2, the specific fracture work by 42 %, relative deformation by 68 %.


Keywords: polymer composite materials (PCM), hybrid composite materials (HCM), сarbon fiber reinfoced plastic (CFRP), ultra-high molecular weight polyethylene fiber (UHMWPE-fiber), carbon and aramid fiber, hybrid fiber, method “Break upon Impact and Static” (BIS), universal BIS-sample (round composite rod), fixing a sample through an intermediate matrix, flexible matrix (FM), rigid matrix (RM), non-equilibrium low-temperature plasma, interaction at the interface, specific absorbed-in-fracture energy.


DOI: 10.30791/1028-978X-2022-10-64-82

Krylov Igor — Baikov Institute of Metallurgy and Materials Science Russian Academy of Sciences (119334, Moscow, Leninsky prospect, 49), senior staff scientist, specialist in the field of technology and mechanics of composite materials. E-mail: igorgra04@gmail.com.

Korneeva Natalia — Semenov Federal Research Center of Chemical Physics Russian Academy of Sciences (119334, Moscow, st. Kosygin, 4), Dr Sci (Eng), leading researcher, specialist in the field of polymer composite materials. E-mail: natakorneeva@mail.ru.

Kudinov Vladimir Vladimirovich — Baikov Institute of Metallurgy and Materials Science Russian Academy of Sciences (119334, Moscow, Leninsky prospect, 49, chief researcher, professor, doctor of technical sciences, died in 2020.

Krylov I.K., Korneeva N.V., Kudinov V.V. Vliyanie zhestkoj i plastichnoj matric na predel'nuyu prochnost' i mekhanizmy razrusheniya polimernyh kompozicionnyh materialov pri udare i v statike [Influence of rigid and flexible matrices on ultimate strength and fracture mechanisms of polymer composite materials upon impact and static loading conditions]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 64 – 82. DOI: 10.30791/1028-978X-2022-10-64-82

t-9

Postoperative control of technological parameters
of ion implantation process using the capacitance-voltage characteristics method


A. A. Anikina, G. O. Danilenko, I. A. Lamkin,
N. O. Patokov, S. A. Tarasov, M. D. Pavlova


Studies of structures, including a hole-conducting epitaxial layer, doped with boron (KDB – 12), and an electron-conducting layer, doped with phosphorus (KEF – 4,5), are presented. A dielectric layer of silicon dioxide SiO2, from 97 nm to 117 nm thick, as measured using ellipsometry, was grown on the wafers. Then, the subsurface layer was doped with phosphorus or boron using ion implantation, with conductivity type corresponding to the substrate. The postoperative control of dopant atoms dose, embedded by ion implantation, was carried out using the capacitance-voltage characteristics. Dopant distribution profiles for the same sample, as well as for different samples with the same implanted dopant dose differed insignificantly. The relative error of the measurements, as compared to the preassigned dose, was no higher than 10 %. The dose parameter deviation higher than 5 % was observed in samples with the preassigned ion dose close to the maximum detectable dose of implanted ions, allowed for this method.


Keywords: charge-coupled devices, ion implantation, capacitance-voltage characteristics, dose of implanted ions.


DOI: 10.30791/1028-978X-2022-10-83-88

Anikina Anna — Saint Petersburg electrotechnical university LETI (Saint Petersburg, 197376, Professora Popova st., 5), postgraduate student of the department of photonics, specialist in design and technology for creation of charge-coupled devices. E-mail: tvoianna@gmail.com.

Danilenko Gleb — Saint Petersburg electrotechnical university “LETI” (Saint Petersburg, 197376, Professora Popova st., 5), student of the department of photonics, specialist in photoelectronic devices.

Lamkin Ivan — Saint Petersburg electrotechnical university “LETI” (Saint Petersburg, 197376, Professora Popova st., 5), PhD (Eng), associate professor of the department of photonics, specialist in photoelectronic devices, agricultural photonics, and solar energy. E-mail: ialamkin@etu.ru.

Patokov Nikita — Saint Petersburg electrotechnical university “LETI” (Saint Petersburg, 197376, Professora Popova st., 5), postgraduate student of the department of photonics, specialist in photoelectronic devices. E-mail: patocov@mail.ru.

Tarasov Sergey — Saint Petersburg electrotechnical university “LETI” (Saint Petersburg, 197376, Professora Popova st., 5), Dr Sci (Eng), associate professor, head of the department of photonics, specialist in photoelectronic devices, agricultural photonics and solar energy. E-mail: satarasov@mail.ru.

Pavlova Marina — Saint Petersburg electrotechnical university “LETI” (Saint Petersburg, 197376, Professora Popova st., 5), postgraduate student, specialist in photoelectronic devices. E-mail: mdpavlova@etu.ru.

Anikina A.A., Danilenko G.O., Lamkin I.A., Patokov N.O., Tarasov S.A., Pavlova M.D. Postoperacionnyj kontrol' tekhnologicheskih parametrov processa ionnoj implantacii metodom vol't-faradnyh harakteristik [Postoperative control of technological parameters of ion implantation process using the capacitance-voltage characteristics method]. Perspektivnye Materialy [Advanced Materials] (in Russ), 2022, no. 10, pp. 83 – 88. DOI: 10.30791/1028-978X-2022-10-83-88

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